JPS642593U - - Google Patents
Info
- Publication number
- JPS642593U JPS642593U JP9615287U JP9615287U JPS642593U JP S642593 U JPS642593 U JP S642593U JP 9615287 U JP9615287 U JP 9615287U JP 9615287 U JP9615287 U JP 9615287U JP S642593 U JPS642593 U JP S642593U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- holding device
- electrostatic holding
- resistor
- supply circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001179 sorption measurement Methods 0.000 claims description 3
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987096152U JPH0436235Y2 (en]) | 1987-06-23 | 1987-06-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987096152U JPH0436235Y2 (en]) | 1987-06-23 | 1987-06-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS642593U true JPS642593U (en]) | 1989-01-09 |
| JPH0436235Y2 JPH0436235Y2 (en]) | 1992-08-26 |
Family
ID=31320982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987096152U Expired JPH0436235Y2 (en]) | 1987-06-23 | 1987-06-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0436235Y2 (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5389339U (en]) * | 1976-12-23 | 1978-07-21 |
-
1987
- 1987-06-23 JP JP1987096152U patent/JPH0436235Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5389339U (en]) * | 1976-12-23 | 1978-07-21 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0436235Y2 (en]) | 1992-08-26 |